发明名称 |
Method and apparatus for ion beam profiling |
摘要 |
An ion beam current density profiler includes a pair of counter-rotating cylindrical masks each featuring a helical slot. The intersection of the slots forms an aperture that scans the width of a ribbon ion beam to allow discrete portions of the beam to impact an inner, concentric current collecting cylinder.
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申请公布号 |
US7064340(B1) |
申请公布日期 |
2006.06.20 |
申请号 |
US20040012585 |
申请日期 |
2004.12.15 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
VANDERBERG BO H.;CRISTOFORO MICHAEL P.;WENZEL KEVIN W. |
分类号 |
H01J37/317 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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