发明名称 Semiconductor device having aluminum conductors
摘要 There is provided a semiconductor device having high reliability, high yield, and such a interconnection structure as short hardly occurs. The semiconductor device comprises a semiconductor substrate, metal conductors formed on a side of a main face of the substrate which metal conductors contain aluminum as main constituent thereof and copper as an additive element, the metal conductors being made to contain such an element as to suppress the precipitation of copper or being made to have such a film adjacent to the metal conductor as to suppress the precipitation of copper.
申请公布号 US7064437(B2) 申请公布日期 2006.06.20
申请号 US20020184932 申请日期 2002.07.01
申请人 HITACHI, LTD. 发明人 IWASAKI TOMIO;MIURA HIDEO;NAKAJIMA TAKASHI;OHTA HIROYUKI;NISHIHARA SHINJI;SAHARA MASASHI
分类号 H01L23/48;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/532;H01L29/94 主分类号 H01L23/48
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