发明名称 NPN transistor having reduced extrinsic base resistance and improved manufacturability
摘要 According to one exemplary embodiment, an NPN bipolar transistor comprises a base layer situated over a collector, where the base layer comprises an intrinsic base region and an extrinsic base region. The NPN bipolar transistor may be, for example, an NPN silicon-germanium heterojunction bipolar transistor. The base layer can be, for example, silicon-germanium. According to this exemplary embodiment, the NPN bipolar transistor further comprises a cap layer situated over the base layer, where a portion of the cap layer is situated over the extrinsic base region, and where the portion of the cap layer situated over the extrinsic base region comprises an indium dopant. The cap layer may be, for example, polycrystalline silicon. According to this exemplary embodiment, the NPN bipolar transistor may further comprise an emitter situated over the intrinsic base region. The emitter may be, for example, polycrystalline silicon.
申请公布号 US7064361(B1) 申请公布日期 2006.06.20
申请号 US20040865634 申请日期 2004.06.10
申请人 NEWPORT FAB. LLC 发明人 HOWARD DAVID;RACANELLI MARCO;U'REN GREG D.
分类号 H01L29/739;H01L21/331;H01L21/8249;H01L29/10;H01L29/167 主分类号 H01L29/739
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