发明名称 Thin film transistor and method for manufacturing the same
摘要 A thin film transistor is provided including a transparent insulating substrate, a lower light shielding film disposed above the transparent insulating substrate, a base interlayer film disposed above the lower light shielding film, a semiconductor film disposed above the base interlayer film, wherein the semiconductor film is formed of polycrystalline silicon. A thin film transistor further comprises roughness formed at an interface between the base interlayer and the semiconductor film, a gate insulating film above the semiconductor film, and a gate electrode above the gate insulating film.
申请公布号 US7064364(B2) 申请公布日期 2006.06.20
申请号 US20040756505 申请日期 2004.01.14
申请人 NEC CORPORATION 发明人 OKUMURA HIROSHI
分类号 G02B5/00;H01L29/76;G02F1/1335;G02F1/1362;G02F1/1368;H01L21/20;H01L21/268;H01L21/316;H01L21/336;H01L29/06;H01L29/786 主分类号 G02B5/00
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