| 摘要 |
FIELD: engineering of ion accelerators, possible use, in particular, for processing surfaces in semiconductor engineering or as engine for spacecrafts. ^ SUBSTANCE: ion accelerator contains ionization chamber, electrode system and magnetic system, while ionization chamber in longitudinal direction has aperture for output of ions and transversely to longitudinal direction is limited by at least one side wall, and a influx aperture positioned at given distance from output aperture, through which through ionization chamber working gas is fed. Electrode system contains at least one cathode and one anode, forming an electrical field in ionization chamber for acceleration of positively charged ions of working gas in direction of output aperture. Magnetic system creates a magnetic field in ionization chamber, which in longitudinal direction has at least one longitudinal portion of first type with higher field component, perpendicular to longitudinal direction, and at least one longitudinal portion of second type with direction of magnetic field, practically parallel to longitudinal direction, adjacent to the previously mentioned longitudinal portion. Distance between oppositely positioned surfaces of walls on longitudinal portion of second type is less, than on longitudinal portion of first type, and shape of wall on second type longitudinal portion in longitudinal direction has monotonously bent convex portion directed towards ionization chamber. ^ EFFECT: increased efficiency. ^ 1 cl, 2 dwg |
