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发明名称
HIGH-RESOLUTION WAVEFRONT MEASUREMENT METHOD AND APPARATUS
摘要
申请公布号
KR20060066802(A)
申请公布日期
2006.06.19
申请号
KR20040105272
申请日期
2004.12.14
申请人
KOREA ATOMIC ENERGY RESEARCH INSTITUTE
发明人
BAIK, SUNG HOON;PARK, SEUNG KYU;CHA, BYUN GHEON
分类号
G01J9/00;G01M11/02
主分类号
G01J9/00
代理机构
代理人
主权项
地址
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