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发明名称
SUBSTRATE PROCESSING APPARATUS HAVING SUBSTRATE ALIGN MEANS
摘要
申请公布号
KR20060067257(A)
申请公布日期
2006.06.19
申请号
KR20040105856
申请日期
2004.12.14
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, MYOUNG SOO;KIM, HAN KI;LEE, KYU SUNG;HUH, MYUNG SOO;JEONG, SEOK HEON
分类号
H05B33/10
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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