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发明名称
ORGANOSILOXANE POLYMER, PHOTO-CURABLE RESIN COMPOSITION, PATTERNING PROCESS, AND SUBSTRATE-PROTECTING COAT
摘要
申请公布号
KR100591663(B1)
申请公布日期
2006.06.19
申请号
KR20020045798
申请日期
2002.08.02
申请人
发明人
分类号
G03F7/075;B05D3/06;C07F7/02;C07F7/08;C07F7/10;C08F230/08;C08G77/04;C08G77/14;C08G77/52;H01L21/027;H01L21/312
主分类号
G03F7/075
代理机构
代理人
主权项
地址
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