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发明名称
小流量液体的温度调整方法及其系统
摘要
本发明系提供一种以微少流动或间歇流动,供给已高精确度地被温度调整的液体之小流量液体的温度调整方法及其系统。该小流量液体的温度调整系统,系加压通过供给路3所供给的液体,并导入至循环路5,在其加压状态下,藉由泵浦6使该循环路5循环,并于该循环路5中的温度调整器7中进行温度调整,使该液体通过从循环路5分歧出来的吐出路9,通过设置于吐出路9的吐出阀10,以至少流量小于循环路5之流量的1/2之微少连续流动或微少间歇流动,供给至外部装置。
申请公布号
TW200619890
申请公布日期
2006.06.16
申请号
TW094138285
申请日期
2005.11.01
申请人
SMC股份有限公司;东京威力科创股份有限公司
发明人
后藤洋康;福田昌弘;山本太郎
分类号
G05D23/00;H01L21/00
主分类号
G05D23/00
代理机构
代理人
林志刚
主权项
地址
日本
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