发明名称 |
OPTICAL MICROELECTROMECHANICAL STRUCTURE |
摘要 |
The invention relates to an optical microelectromechanical structure (MEMS) comprising - an (at least one) optically transmissive layer (UTL) - an (at least one) intermediate layer structure (IL) - a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).
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申请公布号 |
KR20060066671(A) |
申请公布日期 |
2006.06.16 |
申请号 |
KR20057023305 |
申请日期 |
2003.06.06 |
申请人 |
HUNTSMAN ADVANCED MATERIALS(SWITZERLAND) GMBH |
发明人 |
RAVNKILDE JAN TUE;HENNINGSEN HENNING |
分类号 |
B81C1/00;B81B7/00;B81B7/02;B81C3/00;G02B26/02 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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地址 |
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