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发明名称
A MOLECULE SUPPLY SOURCE FOR USE IN THIN-FILM FORMING
摘要
申请公布号
KR20060066622(A)
申请公布日期
2006.06.16
申请号
KR20050093875
申请日期
2005.10.06
申请人
VIEETECH JAPAN CO., LTD.
发明人
SAITO TATEO;KOBAYASHI OSAMU
分类号
C23C14/24;C23C14/12
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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