| 发明名称 |
CONTROL SYSTEM FOR A SPUTTERING SYSTEM |
| 摘要 |
A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.
|
| 申请公布号 |
KR20060066731(A) |
申请公布日期 |
2006.06.16 |
| 申请号 |
KR20067003284 |
申请日期 |
2004.08.18 |
| 申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
TRACY MARK D.;KLEIN JESSE N. |
| 分类号 |
C23C14/54;C23C14/34;H01J37/32;H01J37/34;H01L21/00 |
主分类号 |
C23C14/54 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
