发明名称 Multilayer wiring substrate, and method of producing same
摘要 A method of producing a multilayer wiring substrate is disclosed. The multilayer wiring substrate is free from a core substrate and includes a build up layer which includes an insulator layer and a wiring layer. One of a first main surface and a second main surface of the build up layer is formed with a metal supporting frame body. The method includes the steps of: forming a first insulator layer on a first main surface of a metal supporting plate, where the first insulator layer is included in the insulator layer and becomes a first resist layer which is positioned on the first main surface's side of the build up layer, and forming a first metal pad layer in a given position on a first main surface of the first insulator layer, where the first metal pad layer is included in the wiring layer and becomes a metal pad layer.
申请公布号 US7060604(B2) 申请公布日期 2006.06.13
申请号 US20030454530 申请日期 2003.06.05
申请人 NEC ELECTRONICS CORPORATION 发明人 KATA KEIICHIRO;HONDA HIROKAZU;BABA KAZUHIRO;SHIMOTO TADANORI;KIKUCHI KATSUMI;KAMBE ROKURO;HIRANO SATOSHI;MIYAMOTO SHINYA
分类号 H01L21/4763;H01L23/12;H01L21/48;H01L21/68;H01L23/48;H05K3/00;H05K3/28;H05K3/46 主分类号 H01L21/4763
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