| 摘要 |
A contact resistance measurement method is composed of: placing a first probe onto a first pad connected to an integrated circuit; placing a second probe onto a second pad electrically connected to the first pad; placing a third probe onto a third pad electrically connected to the first pad; measuring a first resistance between the first and second probes; measuring a second resistance between the second and third probes; measuring a third resistance between the third and first probes. A contact resistance between the first probe and the first pad is calculated from the first to third resistances.
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