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发明名称
MODULAR INTEGRATED CIRCUIT TESTER WITH DISTRIBUTED SYNCHRONIZATION AND CONTROL
摘要
申请公布号
KR100589084(B1)
申请公布日期
2006.06.13
申请号
KR20007004563
申请日期
2000.04.27
申请人
发明人
分类号
G01R31/3183;G01R31/26;H01L21/66
主分类号
G01R31/3183
代理机构
代理人
主权项
地址
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