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发明名称
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION DEVICE AND METHOD OF WASHING THE SAME
摘要
申请公布号
KR20060064197(A)
申请公布日期
2006.06.13
申请号
KR20040102903
申请日期
2004.12.08
申请人
LG.PHILIPS LCD CO., LTD.
发明人
PARK, KYUNG SOK
分类号
H01L21/304;H01L21/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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