发明名称 Structure and method for contact pads having a protected bondable metal plug over copper-metallized integrated circuits
摘要 An integrated circuit having copper interconnecting metallization ( 311, 312 ) protected by a first, inorganic overcoat layer ( 320 ), portions of the metallization exposed in windows ( 301, 302 ) opened through the thickness of the first overcoat layer. A patterned conductive barrier layer ( 330 ) is positioned on the exposed portion of the copper metallization and on portions of the first overcoat layer surrounding the window. A bondable metal layer ( 350, 351 ) is positioned on the barrier layer; the thickness of this bondable layer is suitable for wire bonding. A second, organic overcoat layer ( 360 ) is surrounding the window so that the surface ( 360 a) of this second overcoat layer at the edge of the window is at or above the surface ( 350 a) of the bondable layer. The second overcoat layer may be spaced ( 370 ) from the edge of the bondable metal layer.
申请公布号 US7061114(B2) 申请公布日期 2006.06.13
申请号 US20040811124 申请日期 2004.03.25
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HORTALEZA EDGARDO R.;LI LEI
分类号 H01L23/48;H01L23/485 主分类号 H01L23/48
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