| 摘要 |
A method for generating a plasma in a toroidal plasma generator which has a passage having a gas inlet and a gas outlet and forming a circuit, and a coil wound around a part of the gas passage, characterized in that it comprises a step of supplying a mixed gas of an Ar gas containing at least 5 % of NF3 and an NF3 gas and driving the coil by a high frequency electric power, to thereby ignite the plasma, wherein the plasma ignition step is carried out under a total pressure of 6.65 to 66.5 Pa.
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