摘要 |
A gas friction pump, comprising stationary pump-active components ( 14 ) and rotatable pump-active components ( 15 ) secured on a rotatable rotor shaft ( 4 ), wherein the rotor shaft is supported with a bearing ( 5 ) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.
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