发明名称 Gas friction pump
摘要 A gas friction pump, comprising stationary pump-active components ( 14 ) and rotatable pump-active components ( 15 ) secured on a rotatable rotor shaft ( 4 ), wherein the rotor shaft is supported with a bearing ( 5 ) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.
申请公布号 US7059828(B2) 申请公布日期 2006.06.13
申请号 US20040773475 申请日期 2004.02.05
申请人 PFEIFFER VACUUM GMBH 发明人 CONRAD ARMIN;STANZEL JOERG
分类号 F01D25/06;F04D29/056;F04D19/04;F04D23/00;F04D29/04;F04D29/048;F04D29/057;F04D29/10;F16C32/04;F16C32/06;F16C33/80 主分类号 F01D25/06
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