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发明名称
METHOD OF FORMING A METAL LINE IN A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060062818(A)
申请公布日期
2006.06.12
申请号
KR20040101787
申请日期
2004.12.06
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LIM, TAE JUNG;SONG, YOUNG TAEK;PARK, SANG WOOK
分类号
H01L21/28;H01L21/283;H01L21/302
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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