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发明名称
MANUFACTURING METHOD OF CU MIM CAPACITOR IN USING DAMASCENE PROCESS
摘要
申请公布号
KR20060062795(A)
申请公布日期
2006.06.12
申请号
KR20040101752
申请日期
2004.12.06
申请人
MAGNACHIP SEMICONDUCTOR, LTD.
发明人
MIN, BYUNG SEUNG
分类号
H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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