| 摘要 |
A heat treating device which comprises a reaction vessel, and a holder received in the reaction vessel for holding a number of objects to be treated. The lower end of the reaction vessel is closed by a cover body, and a heat insulation unit is installed between the cover body and the holder. Installed on the upper surface of the heat insulation unit is a heat generation body unit consisting of a resistance heat generation wire of high purity carbon material sealed in a quartz plate, with a heat insulation body installed on the underside of this heat generation body unit. The heat insulation unit is fixed to the cover body, a rotatable shaft for rotating the holder extends through the center of the heat insulation unit, and a power feeding path member for feeding power to the heat generation body unit is drawn outwardly of the heat insulation unit.
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