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经营范围
发明名称
Substrate holding device, substrate processing apparatus, and method of releasing substrate
摘要
申请公布号
KR100587848(B1)
申请公布日期
2006.06.12
申请号
KR20030062031
申请日期
2003.09.05
申请人
发明人
分类号
H01L21/68;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
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