| 摘要 |
A switch valve device used for sucking members such as semiconductor chips etc., by vacuum, and vacuum breaking is quickly and smoothly performed with the valve. The valve comprises a vacuum-sucking switch valve function for vacuum sucking, a vacuum- breaking switch valve function for vacuum breaking, and an open-to-air switch valve function that, interlocked with the operation of the vacuum- sucking switch valve function, opens a passage to the air side when the vacuum-sucking switch valve function is off, and closes the passage to the air side when the vacuum-sucking switch valve function is on. The vacuum-sucking switch valve function, the vacuum-breaking switch valve function, and the open-to-air switch valve function are integrally assembled to a main body portion.
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