УСТРОЙСТВО ДЛЯ ПРЕЦИЗИОННЫХ ПЕРЕМЕЩЕНИЙ

摘要

The invention relates to precise instrument engineering and can be used in the form of a reference for determining object displacements and linear dimensions within a nanometre range. The inventive accurately displacing device comprises a plate, preferably monocrystal, made of a piezoelectrical material, exhibiting a low-hysteresis effect and provided with electrodes for connecting to a power supply which are applied to the two opposite sides thereof. Said plate can be provided with a crystallographic axes orientation which modifies the sizes thereof in a direction parallel to the plane of the electrodes when a voltage is supllied thereto, or with a crystallographic axes orientation which modifies the sizes of the plate in a direction perpendiculat to the plane of the elctrodes when a voltage is supllied thereto. The top electrode can be provided with a protective layer made, for example, from a diamond-like film or sapphire.