| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamber for liquid inspection with less error of chamber thickness. SOLUTION: The chamber for liquid inspection comprises a base substrate 11 and an upper cover 13 stuck to the upper part of the base substrate 11 through an adhesive layer 12, and a first recessed part 14 is disposed on the base substrate 11 side of the upper cover 13. The chamber further comprises a first chamber 15 formed by this first recessed part 14 and the base substrate 11, a second recessed part 18 having a thickness different from that of the first recessed part 14 to be connected to the upper cover 13, and a second chamber 19 formed of the second recessed part 18 and the base substrate 11. Thus, the chamber for liquid inspection with the small thickness error can be provided. COPYRIGHT: (C)2006,JPO&NCIPI
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