| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of obtaining a definite vibration state without exerting the effect of the surface uneven shape of a sample on the resistance effect to a cantilever, and also provide a scanning probe microscope. SOLUTION: The scanning probe microscope is equipped with a sharpened probe 2, the cantilever 11 having the probe 2 provided to its leading end in a protruded state and a support part 12 for supporting the cantilever 11. The scanning in the X- and Y-directions parallel to the surface of the sample and movement in a Z-direction of the surface of the sample of the probe 2 are relatively performed with respect to the surface of the sample and the shield plate 13 connected to the support part 12 is provided between the cantilever 11 and the surface of the sample. COPYRIGHT: (C)2006,JPO&NCIPI
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