发明名称 |
LOW TEMPERATURE SYNTHESIS METHOD OF DIAMOND |
摘要 |
PROBLEM TO BE SOLVED: To provide a low temperature synthesis method of diamond by which the diamond can be synthesized on a substrate of any kind of material without using gaseous hydrogen and the diamond can be inexpensively and easily synthesized. SOLUTION: The diamond is synthesized on the surfaces of substrates 4a, 4b by generating a high frequency discharge plasma while heating and evaporating a metalloporphyrin complex 5 which is oppositely arranged in the vicinity of the surfaces of the substrates. COPYRIGHT: (C)2006,JPO&NCIPI
|
申请公布号 |
JP2006143561(A) |
申请公布日期 |
2006.06.08 |
申请号 |
JP20040339468 |
申请日期 |
2004.11.24 |
申请人 |
JAPAN SCIENCE & TECHNOLOGY AGENCY |
发明人 |
KUMAR SAKTHI;YOSHIDA YASUHIKO |
分类号 |
C30B29/04;C23C16/27;H01L21/205;H01L21/314 |
主分类号 |
C30B29/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|