发明名称 LOW TEMPERATURE SYNTHESIS METHOD OF DIAMOND
摘要 PROBLEM TO BE SOLVED: To provide a low temperature synthesis method of diamond by which the diamond can be synthesized on a substrate of any kind of material without using gaseous hydrogen and the diamond can be inexpensively and easily synthesized. SOLUTION: The diamond is synthesized on the surfaces of substrates 4a, 4b by generating a high frequency discharge plasma while heating and evaporating a metalloporphyrin complex 5 which is oppositely arranged in the vicinity of the surfaces of the substrates. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006143561(A) 申请公布日期 2006.06.08
申请号 JP20040339468 申请日期 2004.11.24
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY 发明人 KUMAR SAKTHI;YOSHIDA YASUHIKO
分类号 C30B29/04;C23C16/27;H01L21/205;H01L21/314 主分类号 C30B29/04
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