发明名称 |
Method for measuring contour variations |
摘要 |
A method for measuring a contour variation of a measuring area on an object. The method includes the steps of: irradiating the measuring area with a light beam, wherein reflection or transmission of the beam occurs; splitting the transmitted or reflected beam; combining the split beams with each other and observing a fringe pattern representing a differential phase between the split beams; varying the phase of the split beams relative to each other, such that the differential phase is kept within the range of 2 pi; calculating an optical path length difference from the differential phase; and relating the optical path length difference to the contour variation of the object.
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申请公布号 |
US2006119861(A1) |
申请公布日期 |
2006.06.08 |
申请号 |
US20050527410 |
申请日期 |
2005.12.27 |
申请人 |
SAUNDERS IAN;KORPERSHOEK JACOBUS J;BRUG HEDSER V |
发明人 |
SAUNDERS IAN;KORPERSHOEK JACOBUS J.;BRUG HEDSER V. |
分类号 |
G01B11/02;G01B9/02;G01B11/24 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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