发明名称 Method for forming halo/pocket implants through an L-shaped sidewall spacer
摘要 The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit including the same. The method for manufacturing the semiconductor device, among other steps, includes forming an L-shaped spacer ( 410 ) proximate a sidewall of a gate structure ( 130 ) located over a substrate ( 110 ), and implanting halo/pocket implant regions ( 620 ) through the L-shaped spacer ( 410 ) and in the substrate ( 110 ).
申请公布号 US2006121681(A1) 申请公布日期 2006.06.08
申请号 US20040002764 申请日期 2004.12.02
申请人 TEXAS INSTRUMENTS, INC. 发明人 NANDAKUMAR MAHALINGAM
分类号 H01L21/336;H01L21/425 主分类号 H01L21/336
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