发明名称 Micro-electromechanical sensor
摘要 A force or pressure transducer is disclosed. In one embodiment, the transducer has a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and a portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured by circuit means.
申请公布号 US2006117857(A1) 申请公布日期 2006.06.08
申请号 US20060329765 申请日期 2006.01.10
申请人 REDWOOD MICROSYSTEMS, INC. 发明人 ZIAS ART;MAUGER PHIL;CAHILL SEAN;NYSTROM NORM;HENNING ALBERT K.
分类号 G01L9/12;G01L1/14;G01L9/00;H01G5/18;H01L29/84 主分类号 G01L9/12
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