| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer ceramic element in which deformation of a through hole can be suppressed in burning. <P>SOLUTION: Since the underside region in through hole (TH) 13 is filled with a conductive member 14 in a multilayer ceramic element 1, contraction of the conductive member 14 is reduced in burning as compared with a case where the entire region in the TH is filled with a conductive member. Furthermore, a part of an upper piezoelectric layer 5 adjacent to a piezoelectric layer 3 having the TH 13 formed therein is arranged in the region S not filled with a conductive member within the TH 13 of the piezoelectric layer 3, and a part of an upper piezoelectric layer 3 adjacent to a piezoelectric layer 5 having the TH 13 formed therein is arranged in the region S within the TH 13 of the piezoelectric layer 5. Consequently, even if the conductive member 14 contracts to some extent at the time of burning, deformation of the TH 13 is limited by a part of the piezoelectric layers 3 and 5 arranged in the region S within the TH 13. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
