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发明名称
MIKROMECHANISCHES BAUELEMENT UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN
摘要
申请公布号
DE50109722(D1)
申请公布日期
2006.06.08
申请号
DE20015009722
申请日期
2001.12.13
申请人
ROBERT BOSCH GMBH
发明人
BENZEL, HUBERT;WEBER, HERIBERT;ARTMANN, HANS;SCHAEFER, FRANK
分类号
B81B3/00;B81C1/00;H01L29/84
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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