| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device capable of coating a viscous liquid 3 on a substrate 2 with a desired thickness and a method for coating the viscous liquid. <P>SOLUTION: This manufacturing method provides for a semiconductor device having a process for coating a viscous liquid 3. The viscous liquid 3 is coated on the principal surface of a substrate 2, a flexible coating material 5 whose binding power to molecules in the viscous liquid 3 is stronger than that between molecules in that liquid 3 is coated and adhered on the viscous liquid 3, and then a clothing material 5 is peeled off including part of the viscous liquid 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
