发明名称 PIEZOELECTRIC RESONATOR ELEMENT, PIEZOELECTRIC DEVICE AND GYRO SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric resonator element and a piezoelectric device in which a CI value is suppressed low by improving resonance balance. <P>SOLUTION: A piezoelectric resonator element comprises: a base 51 made of a piezoelectric material; at least a pair of resonating arms 34, 35 provided in a unified manner with the base and extending in parallel with each other from the base; a long groove provided to each of the resonating arms and extending along a longitudinal direction; and a driving electrode formed to the long groove. Each of the resonating arms includes an adjustment structure 61, 62 to adjust hardness balance between right and left structures with respect to a virtual central line C1 extending in the longitudinal direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006148856(A) 申请公布日期 2006.06.08
申请号 JP20050118400 申请日期 2005.04.15
申请人 SEIKO EPSON CORP 发明人 KIKUSHIMA MASAYUKI
分类号 H03H9/215;G01C19/56;G01C19/5621;H03H9/19 主分类号 H03H9/215
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