| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide laser processing equipment in which the function of observing the substrate surface and the function of condensing laser beam to an arbitrary position in the substrate are realized simultaneously. <P>SOLUTION: When an internal processing region is formed by condensing a laser beam L from the substrate surface 11 to condensing point A of a predetermined depth in the substrate, the laser beam condensing position in the substrate can be adjusted independently from adjustment of a focal point for observing the irradiating surface of the substrate surface 11 through an automatic focusing mechanism by an optical system equipped with an afocal optical system for condensing the laser beam L into the substrate, an optical system equipped with an automatic focusing mechanism 52c for observing the substrate surface 11, and an objective lens 52a being shared by two optical systems. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
