| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt-measuring sensor with high sensitivity in addition to easy to manufacture. SOLUTION: In order to solve the above-mentioned problem, a tilt-measuring includes a displacement section 2, which is displaced relative to a fixed section 1 so as to measure displacement magnitude of the displacement section 2 from the variation of electrical capacitance between the fixed section 1 and the displacement section 2 resulting from a displacement of the displacement section 2 due to acceleration, while by enlarging of the mass of the displacement section 2 to enhancement of the sensitivity can be readily coped with. Moreover, since the spring constant of a narrow width section 4 can be reduced, the sensitivity can also be enhanced through this reduction. COPYRIGHT: (C)2006,JPO&NCIPI
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