| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical Hall element for suppressing variations in element sensitivity caused by variation in ambient temperature, manufacturing conditions, or the like, and for highly maintaining detection precision as a magnetic detecting element. SOLUTION: Impurity concentration at a part adjacent to the pn junction side of diffusion layers (p-type diffusion separation walls) 14, 14a, 14b for electrically dividing the inside of a substrate through a pn junction is enhanced selectively near the substrate surface, where high-concentration regions (n<SP>+</SP>-layer) 15a-15c are formed. COPYRIGHT: (C)2006,JPO&NCIPI
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