| 摘要 |
PROBLEM TO BE SOLVED: To solve conventional problems on oil lubrication or solid lubrication by rotating a disc subjected to a partially mirror polished CVD (chemical vapor deposition) diamond or DLC (diamond-like carbon) coating to actualize sliding motion with low friction as in air flotation. SOLUTION: Two coating plates each manufactured by applying a coating of a 10μm-thick CVD diamond film to a 5 cm-in-diameter and 1 mm-thick polycrystal silicon substrate using a microwave CVD method (output 1 kW) are fitted to each other to form the partially mirror polished CVD diamond coating disc having a surface roughness of about 0.2μm which is fixed to a small radial motor. The disc is put on a rolled aluminum plate. When the motor is rotated until its rotating speed reaches 1,200 rpm, the motor is put into a stational floating condition and it can be moved in any direction with slight pushing operation. COPYRIGHT: (C)2006,JPO&NCIPI
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