发明名称 Active scan velocity control for torsional hinged MEMS scanner
摘要 System and method for adjusting an operational parameter of a component that drifts with temperature changes. The system includes a torsional hinged device that oscillates at a resonant frequency, and the resonant frequency of the device drifts or varies with temperature. Differences of a selected parameter between a drive signal and the actual selected parameter are monitored to determine changes in the resonant frequency. An output signal representative of change in the resonant frequency is used to adjust another component that also has a parameter that varies with temperature changes. The adjustment compensates for the temperature drift.
申请公布号 US2006117854(A1) 申请公布日期 2006.06.08
申请号 US20040004457 申请日期 2004.12.03
申请人 TURNER ARTHUR M 发明人 TURNER ARTHUR M.
分类号 G01H13/00 主分类号 G01H13/00
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