发明名称 REFLECTIVE OPTICAL SYSTEM
摘要 A lens arrangement (10) is presented. The lens arrangement comprises a first element (12) having a concave reflective surface and defining an optical axis (OA) of the lens arrangement, and a second substantially flat and at least partially reflective element (14) spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle ßof incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.
申请公布号 WO2006059330(A2) 申请公布日期 2006.06.08
申请号 WO2005IL01287 申请日期 2005.12.01
申请人 NOVA MEASURING INSTRUMENTS LTD.;LYUBCHIK, YAKOV;SCHEINER, DAVID;WINIK, MICHAEL 发明人 LYUBCHIK, YAKOV;SCHEINER, DAVID;WINIK, MICHAEL
分类号 G02B17/06;G01B11/02;G01N21/21;G01N21/956;G02B17/02;H01L21/66 主分类号 G02B17/06
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