发明名称 |
Eingebaute mikroelektromechanische (MEMS) Sensorvorrichtung für Leistungshalbleiter |
摘要 |
An on-board micro-electromechanical (MEMS) isolator is provided on board a power semiconductor device for measuring voltage, current, or both. In particular, the power semiconductor may comprise a plurality of transistors connected in parallel, such that a MEMS isolator connected in parallel with one of the transistors measures voltage across the semiconductor. A MEMS isolator may further be connected in series with the transistors to measure current flow thereacross. A compensation circuitry may be provided to receive the current output from the isolator, and determine total current flow through the power semiconductor. <IMAGE> |
申请公布号 |
DE60205560(T2) |
申请公布日期 |
2006.06.08 |
申请号 |
DE2002605560T |
申请日期 |
2002.10.25 |
申请人 |
ROCKWELL AUTOMATION TECHNOLOGIES, INC. |
发明人 |
HARRIS, RICHARD D.;KRETSCHMANN, ROBERT J. |
分类号 |
G01R15/20;G01R31/26 |
主分类号 |
G01R15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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