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发明名称
DEFECT INSPECTION METHOD
摘要
申请公布号
KR100586293(B1)
申请公布日期
2006.06.08
申请号
KR20040082130
申请日期
2004.10.14
申请人
发明人
分类号
G01B11/02;G01N21/88;G01N21/956;G06K9/00;G06T1/00;G06T7/00;H01L21/66
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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