| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy beam machining device and an energy beam machining method capable of maintaining the condensing state of energy beams such as ion beams, the irradiation direction of energy beams on a work, and simplifying the work of converting the energy of the energy beam with which the work is irradiated according to a machining condition or the like such as the machining depth of the work. SOLUTION: In the energy beam machining device X to machine a work 7 by allowing the work 7 to be irradiated with proton beams L1 (energy beams), an energy converting means 10 to convert the energy of the proton beams L1 is provided on the optical path of the proton beams 1 between an energy beam generation source consisting of an ion generation source 1 and an ion acceleration apparatus 2 and the work 7. COPYRIGHT: (C)2006,JPO&NCIPI |
