HEATING PLATE AND HEAT TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment device capable of effectively reducing deformation even if the weight per sheet of a heating plate is reduced, using a heating plate with a large area capable of reducing electric capacity for heating. SOLUTION: A heating element 2 is interposed and held between a first heating element holding plate 3 and a second heating element holding plate 1. Further, the deformation of the heating plate is prevented and it is made possible to reduce the weight and electric capacity of the heating plate by constituting the heating plate with a large area by mounting and holding a lattice-shaped supporting plate 4 on a first heating element holding plate side. The heat treatment device is formed by mounting at least one sheet of the heating plate with large area inside a heat insulation chamber surrounded by a heat insulation body so as to leave a space at least at one face side of the heating plate with large area. COPYRIGHT: (C)2006,JPO&NCIPI