| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus which improves work efficiency. SOLUTION: According to the wafer transfer apparatus 100, a camera 116 is arranged above the center of a fork drive unit 111, so that the transfer of a wafer 120a is unnecessary. When a worker has a difficulty in reading an identification mark 120 ax because it is upside-down or inclined to the left or right, the direction of the identification mark 120 ax at a wafer image display unit 118 can be adjusted by executing image processing. This eliminates a need of aligning the wafer 120a. The whole of the wafer 120a including its periphery is exhibited on the wafer image display unit 118 without rotating the wafer 120a, which makes work of rotating the wafer 120a unnecessary. COPYRIGHT: (C)2006,JPO&NCIPI
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