发明名称 |
HYDROPHILIC COATINGS, METHODS FOR DEPOSITING HYDROPHILIC COATINGS, AND IMPROVED DEPOSITION TECHNOLOGY FOR THIN FILMS |
摘要 |
The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed. |
申请公布号 |
WO2006060597(A2) |
申请公布日期 |
2006.06.08 |
申请号 |
WO2005US43508 |
申请日期 |
2005.12.02 |
申请人 |
CARDINAL CG COMPANY;MYLI, KARI;PFAFF, GARY;BROWNLEE, JAMES;GERMAN, JOHN;KRISKO, ANNETTE;HARTIG, KLAUS |
发明人 |
MYLI, KARI;PFAFF, GARY;BROWNLEE, JAMES;GERMAN, JOHN;KRISKO, ANNETTE;HARTIG, KLAUS |
分类号 |
C03C17/34;C03C17/36;C23C14/34 |
主分类号 |
C03C17/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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