| 摘要 |
PROBLEM TO BE SOLVED: To provide a material characteristic evaluation device capable of enhancing evaluation precision in material characteristic evaluation such as a hardness test. SOLUTION: This material characteristic evaluation device 100 for evaluating a characteristic of a sample S based on a recess, by pushing an indenter tip part 204 of an indenter 2 into a sample S surface to form the recess, is provided with a lever 3 for supporting movably the indenter with respect to the sample surface, an electromagnetic force generating part 5 for generating force for moving the lever, an inclinometer 6 for detecting an inclination of the lever, and a posture control part 41 for generating the force in the electromagnetic force generating part to control a posture of the lever to push the indenter tip part in perpendicularly to the sample surface, based on the inclination detected by the inclinometer. COPYRIGHT: (C)2006,JPO&NCIPI
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