| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid raw material vaporizing apparatus capable of efficiently vaporizing solid raw material and consistently feeding vaporization gas. SOLUTION: The solid raw material vaporizing apparatus comprises a raw material container to store solid raw material, a gas introduction port to introduce gas into the raw material container, and a gas outlet to discharge gas from the raw material container, wherein a side wall of an internal space of the raw material container has an inwardly protruded portion. COPYRIGHT: (C)2006,JPO&NCIPI
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