| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film which is more excellent in wear resistance than (Al, Ti)(N, C)-based film which is most excellent in wear resistance among known TiN film, TiC film, TiCN film, (Al, Ti)(N, C)-based film, and has the wear resistance enough for high-speed cutting. SOLUTION: (1) The hard film is a crystalline hard film and consists of multiple nitride, multiple carbide, multiple boride, multiple carbo-nitride, multiple boro-nitride, multiple carbo-boride or multiple carbo-nitride-boride of Al and X (X: one kind of Cr and V), and the composition of Al and X is expressed by (Al<SB>1-y</SB>X<SB>y</SB>), (where, X is one kind of Cr and V, and 0 < y≤0.3). (2) The thickness of the hard film is 0.1-20μm. COPYRIGHT: (C)2006,JPO&NCIPI
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